Electrostatic-comb Drive of Lateral Polysilicon Resonators

This paper mvestlgates the elcctrostatlc dnve and sense of polynhcon resonators parallel to the substrate, using an mterdlgtated capacitor (electrostatic comb) Three expenmental methods are used nucroscoplc observation mth contmuous or stroboscopic iummatlon, capacltlve sensing using an amphtude-modulation technique and SEM observation The mtnnslc quality factor of the phosphorus-doped low-pressure chemlcal-vapordeposited (LPCVD) polyslhcon resonators is 49 000 + 2000, whereas at atmosphenc pressure, Q < 100 The finger gap IS found to have a more pronounced effect on comb charactenstlcs than finger width or length, as expected from simple theory